Name:	Professor R Cheung
Organisation:	University of Edinburgh
Department:	Sch of Engineering
Current EPSRC-Supported Research Topics:

Current EPSRC Support

There is no current EPSRC Support

Previous EPSRC Support

EP/M026914/1 Graphene Micro-sensors for Adaptive Acoustic Transduction (GMAAT) (P) EP/G063710/1 A multichannel adaptive integrated MEMS/CMOS microphone (P) EP/C541820/1 Equipment for Supporting Microsystems Research at Edinburgh & IMRC related projects at Cambridge, Cranfield, Heriot-Watt & Loughborough (C) GR/T06322/01 Integration of Microelectromechanical Systems (MEMS) with Electronics in Silicon Carbide for Harsh Environments (P) GR/T09873/01 Biomorphic wind sensing: integrating MEMS and analogue VLSI into robotics. (C) GR/S12838/01 PLATFORM: PLATFORM GRANT TO SUPPORT THE DEVELOPMENT OF MICRO/NANO TECHNOLOGY ACROSS A RANGE OF DISCIPLINES (C) GR/R38019/01 Development of Low Damage Dry Etch Processes for Silicon Carbide Microelectromechanical Systems (MEMS) (P) GR/R36978/01 Research visits to Delft institute of microelectronics and sub-micron technology (DIMES), The Netherlands (P)

Key: (P)=Principal Investigator, (C)=Co-Investigator, (R)=Researcher Co-Investigator