| EPSRC Reference: |
GR/R38019/01 |
| Title: |
Development of Low Damage Dry Etch Processes for Silicon Carbide Microelectromechanical Systems (MEMS) |
| Principal Investigator: |
Cheung, Professor R |
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| Project Partners: |
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| Department: |
Sch of Engineering |
| Organisation: |
University of Edinburgh |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 December 2001 |
Ends: |
30 November 2004 |
Value (£): |
293,071
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Materials Processing |
| Microsystems |
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Summary on Grant Application Form |
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The proposed research sets out to develop an optimised processing technology to provide a fundamental basis for the future development of high temperature microelectromechanical systems (MEMS) in silicon carbide. The excellent electrical, mechanical and chemical properties of SiC, as well as is high electrical breakdown field offer exciting application possibilities in harsh environments. However, many of the properties that make SiC attractive for MEMS and electronic device applications, also make it a difficult material to process and micromachine. In particular, its chemical inertness provides the ultimate challenge for pattern transfer into the substrate. For example, no reliable wet etchant has been found for SiC. This project proposes to focus on aspects of research important for future MEMS developments in SiC with the main aims being:1) To develop a low damage, fast (hundreds of nm/min.) dry etch process with high selectivity and flexible etch profile control in silicon carbide (SiC) for high temperature microelectromechanical systems (MEMS). Such a process will make possible application areas, such as sensors and actuators, where large etch depths with good profile control are a desired feature.2) To develop fabrication procedures and characterise the electro-mechanical properties of SiC resonant beam devices.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ed.ac.uk |