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Details of Grant 

EPSRC Reference: GR/S12838/01
Title: PLATFORM: PLATFORM GRANT TO SUPPORT THE DEVELOPMENT OF MICRO/NANO TECHNOLOGY ACROSS A RANGE OF DISCIPLINES
Principal Investigator: Walton, Professor AJ
Other Investigators:
UNDERWOOD, Professor I Stevenson, Professor JTM Cheung, Professor R
Haworth, Dr L Ewen, Dr PJ Snell, Dr AJ
Researcher Co-Investigators:
Mr A Gundlach
Project Partners:
Department: Sch of Engineering
Organisation: University of Edinburgh
Scheme: Platform Grants (Pre-FEC)
Starts: 01 December 2003 Ends: 30 November 2006 Value (£): 426,895
EPSRC Research Topic Classifications:
Electronic Devices & Subsys. Microsystems
EPSRC Industrial Sector Classifications:
Electronics Transport Systems and Vehicles
Aerospace, Defence and Marine Communications
Related Grants:
Panel History:  
Summary on Grant Application Form
The platform grant will be used to develop key technologies that will become essential for the Silicon Technology Research Group to implement in the next few years. These include wafer bonding (with buried layers) and the associated wafer thinning to provide projects with access to custom wafers which are very difficult to procure in small quantities. The other capability to be developed is the technology to post-process individual chips based upon the very successful post-processing of full silicon wafers. Post-processing full silicon wafers is an expensive option (20,000 per run) for speculative projects. Many potential collaborators who use resources such as Europractice, receive their devices as chips (typically 20-30). The existing fabrication facilities at Edinburgh are mainly focussed on handling wafers and, at present, the technology is not available to routinely handle individual chip post-processing. This capability is not generally available elsewhere and from the number of enquiries we receive there is a significant demand from the research community. The funding would also be used to provide the group with the resources to make better use of existing capabilities and, perhaps most importantly of all, pump-prime new and adventurous research projects. In addition it will also provide travel resources to enable staff to spend more time visiting other research establishments and developing further international collaborations
Key Findings
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Potential use in non-academic contexts
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Impacts
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Summary
Date Materialised
Sectors submitted by the Researcher
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Project URL:  
Further Information:  
Organisation Website: http://www.ed.ac.uk