Details of Grant 

EPSRC Reference:	GR/R52626/01
Title:	Resonant Microsensor Modules for Measurement of Physical Quantities (REMISE)
Principal Investigator:	White, Professor NM
Other Investigators:	Beeby, Professor SP
Researcher Co-Investigators:	Professor SP Beeby Professor BE Jones Dr R Rakowski Dr MJ Tudor
Project Partners:	Advanced Witness Systems Ltd Applied Weighing International Ltd ESI First Inertia Switch Ltd GKN Aerospace (Melrose) Industrial Measurements Ltd National Physical Laboratory NPL Rolls-Royce Plc (UK) Tata Steel Limited
Department:	Electronics and Computer Science
Organisation:	University of Southampton
Scheme:	Faraday (PreFEC)
Starts:	01 June 2002	Ends:	31 May 2005	Value (£):	179,844
EPSRC Research Topic Classifications:	Instrumentation Eng. & Dev.
EPSRC Industrial Sector Classifications:	Aerospace, Defence and Marine Pharmaceuticals and Biotechnology Transport Systems and Vehicles No relevance to Underpinning Sectors
Related Grants:	GR/R51773/01
Panel History:
Summary on Grant Application Form
Current industrial measuring systems based on strain-gauge technology (wire, foil and thin-film devices) suffer from various problems, such as low amplitude intensity signal levels, hysteresis and creep. The purpose of the proposed research is to combine the experiences and academic strengths of two well-established research teams at Brunei and Southampton Universities to provide a practical basis for an alternative generic technology employing small mechanical frequency-based stress gauges which can become available to a wide range of industrial manufacturers and users. Novel robust resonant microsensor modules will be developed based upon miniature triple beam tuning fork structures and fabricated both in steel and on silicon. Excitation and detection will utilise screen-printed PZT thick-inks. Suitable resonator packaging (mechanicaVelectrical interfaces and integration) will be developed. With the active support of the industrial collaborators (6 SME manufacturers and 7 industrial users),.4 demonstrators will be used to evaluate the application of the microsensor modules: (i) pressure sensor, (ii) continuous torque sensor; (iii) load cell; (iv) wireless stress gauge. The initial demonstrators will employ the small metallic resonators fabricated using etching methods and spot welding, while subsequent demonstrators will employ the miniature silicon resonators fabricated using silicon micromachining.
Key Findings
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Organisation Website:	http://www.soton.ac.uk