| EPSRC Reference: |
GR/K76757/01 |
| Title: |
INVESTIGATION OF PHASE FILTERS FOR ENHANCEMENT OF SUB MICRON OPTICAL LITHOGRAPHY SYSTEMS |
| Principal Investigator: |
Prewett, Professor PD |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Central Microstructure Facility |
| Organisation: |
STFC Laboratories (Grouped) |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 1995 |
Ends: |
31 December 1997 |
Value (£): |
84,490
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| EPSRC Research Topic Classifications: |
| Optoelect. Devices & Circuits |
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Summary on Grant Application Form |
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Investigation of the design and assessment of phase filters for the enhancement of performance of conventional optical lithography system operating at less and 0.5um minimum feature size. Designs will be based on iterative optimization. Filters to modify both the projection lens performance and the source will be considered. Joint assessment of performance will take place at CMF using a specially designed lens.
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Key Findings |
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Potential use in non-academic contexts |
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Impacts |
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| Description |
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| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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