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EPSRC Reference: GR/K72223/01
Title: DIAMOND NANOSTRUCTURES:FULLERENE SELECTIVE AREA GROWTH COMPARED TO LASER PATTERNING FOR MICROENGINEERING
Principal Investigator: Jackman, Professor RB
Other Investigators:
Foord, Professor J Goodall, Mr F
Researcher Co-Investigators:
Project Partners:
Department: Electronic and Electrical Engineering
Organisation: UCL
Scheme: Standard Research (Pre-FEC)
Starts: 01 January 1996 Ends: 31 December 1997 Value (£): 56,433
EPSRC Research Topic Classifications:
Materials Processing
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
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Summary on Grant Application Form
CVD diamond has great potential in microengineering as an ultra-low wear coating and fabricating material, as well as in other nanostructure applications. A major existing hurdle is to establish routes for the nanofabrication of diamond structures. We investigate two routes: (i) selective area growth; (ii) excimer laser projection patterning. The reaction between C60 and patterned Si/Si02 substrates will be investigated to identify reaction conditions for selective C deposition in the Si windows. Subsequent diamond growth will then be carried out on these activated wafers in order to prepare diamond nanostructures. The influence of process parameters on nanostructures prepared by laser projection patterning will be investigated in order to improve control of side-wall angle, graphitisation and surface roughness. An overall objective is to identify the characteristics and capabilities of these important approaches to diamond nanofabrication, which are fundamental to the future of CVD diamond as a nanostructure material.
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