| EPSRC Reference: |
GR/K13837/01 |
| Title: |
RELIABILITY AND DESIGN RULES FOR DEEP SUBMICRON AND POWER INTEGRATED CIRCUIT INTERCONNECT TECHNOLOGY |
| Principal Investigator: |
O'Neill, Professor A |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Electrical, Electronic & Computer Eng |
| Organisation: |
Newcastle University |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
30 June 1995 |
Ends: |
29 March 1999 |
Value (£): |
136,503
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| EPSRC Research Topic Classifications: |
| Design & Testing Technology |
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Summary on Grant Application Form |
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Development of interconnect design rules for metallic tracks of line width 1mm to 0.1micron and for vias and contacts; correlation of data from scanning electron microscopy, electrical measurements and computer simulation on electromigration and stressmigration; assessment of the effects of passivation and intermetal dielectric on interconnect technology; investigation of new metallurgy; understanding the mechanisms of damage development; comparisons of dc, ac and interrupted testing.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ncl.ac.uk |