| EPSRC Reference: |
GR/J46340/01 |
| Title: |
SILICON MICROFABRICATION FACILITY |
| Principal Investigator: |
Kemhadjian, Professor H |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Electronics and Computer Science |
| Organisation: |
University of Southampton |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 August 1993 |
Ends: |
10 April 1996 |
Value (£): |
4,667,397
|
| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Instrumentation Eng. & Dev. |
| Materials Processing |
|
|
| EPSRC Industrial Sector Classifications: |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
To research advanced devices and related technology and material systems, including micromachining. As a result to provide well characterised processes for use by associated and external researchers.Since the start date we have greatly improved our dry etching and plasma deposition capabilities by the commissioning of three new machines. The characterisation of LPCVD SiGe growth has also made excellent progress with well defined layers being produced regularly for use in advanced device research throughout the community.A number of exacting nanostructures have also been produced for the physics community, some of which have evolved from established research collaborations.Some demanding novel structures are also under development for biochemical applications where fine dimensions have to be achieved over large areas.Similar challenges arise in the development of waveguide structures of various types which also need very stringently controlled material characteristics.New Micromachining techniques are being evolved alongside established silicon processing to produce a variety of structures and devices for internal and external researchers.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.soton.ac.uk |