| EPSRC Reference: |
GR/J43363/01 |
| Title: |
MECHANICAL CHARACTERISATION OF MICROMECHANICAL STRUCTURES |
| Principal Investigator: |
Wood, Professor D |
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| Department: |
Engineering and Computing Sciences |
| Organisation: |
Durham, University of |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 February 1994 |
Ends: |
31 January 1997 |
Value (£): |
17,612
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Summary on Grant Application Form |
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A programme of basic research will be conducted to provide greater understanding of the mechanical properties of micromechanical structures which have been micromachined from silicon. Test methods will be developed which can provide static and dynamic loading conditions and sense mechanical movements of the order of a micron with a spatial resolution of less than 10 microns. The project will involve collaboration between the University of Newcastle upon Tyne and the University of Durham, with the latter fabricating test structures and the former performing the mechanical measurements and their evaluation. The conclusions drawn from this work are expected to significantly enhance computer/theoretical models of these structures which will result in shorter development cycles and improved reliability. The methods developed will also be used to provide experimental data on the mechanical characteristics of microfabricated structures such as elasticity, friction and fatigue life.
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Key Findings |
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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