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EPSRC Reference: GR/H32759/01
Title: TWO DIMENSIONAL ANALYSIS OF DOPANT AND IMPURITY DISTRIBUTIONS IN SEMICONDUCTORS USING SIMS
Principal Investigator: Dowsett, Professor MG
Other Investigators:
Walton, Professor AJ
Researcher Co-Investigators:
Project Partners:
Department: Physics
Organisation: University of Warwick
Scheme: Standard Research (Pre-FEC)
Starts: 01 April 1992 Ends: 31 March 1993 Value (£): 64,809
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Organisation Website: http://www.warwick.ac.uk