| EPSRC Reference: |
GR/N06038/01 |
| Title: |
THIN FILM PIEZOELECTRIC ACTUATION FOR MICROENGINEERED MICROWAVE COMPONENTS:DESIGN & MODELLING |
| Principal Investigator: |
Fox, Professor C |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Sch of Mech Materials Manuf Eng Mgt |
| Organisation: |
University of Nottingham |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 September 2000 |
Ends: |
28 February 2003 |
Value (£): |
90,131
|
| EPSRC Research Topic Classifications: |
|
| EPSRC Industrial Sector Classifications: |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
This programme is a collaborative design, modelling, fabrication and packaging study of incorporating piezoelectric thin films onto silicon microstructures to demonstrate useful high frequency microwave components.Analytical and FE modelling techniques will be applied at Nottingham University to investigate a range of micromachined structures that can be actuated in a controlled fashion. Particular emphasis will be placed on microwave switches, voltage-tunable capacitors and micromechanical resonators for filter applications. Design rules will be developed where possible.At Cranfield University patterning and etching techniques will be developed to allow fabrication of a piezoelectrically actuated microwave microswitch. Packaging studies will be undertaken by Micro Circuit Engineering (MCE) and the device incorporated into a MCE and Marconi Matra Space (MMS) designed microwave circuit for testing at Cranfield. MMS will undertake space qualification testing.The feasibility of the technology to produce novel micro-mechanical resonators and filters and voltage controlled capacitors will be assessed by modelling studies.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.nottingham.ac.uk |