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Details of Grant 

EPSRC Reference: GR/N06007/01
Title: THIN FILM PIEZOELECTRIC ACTUATION FOR MICROENGINEERED MICROWAVE COMPONENTS:FABRICATION PACKAGING & TESTING
Principal Investigator: Kirby, Dr PB
Other Investigators:
Whatmore, Professor RW
Researcher Co-Investigators:
Project Partners:
Airbus Operations Limited European Technology for Micro Circuit Engineering
Department: Sch of Industrial and Manufacturing Scie
Organisation: Cranfield University
Scheme: Standard Research (Pre-FEC)
Starts: 01 October 2000 Ends: 31 December 2003 Value (£): 192,365
EPSRC Research Topic Classifications:
Microsystems
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
GR/N06038/01
Panel History:  
Summary on Grant Application Form
This programme is a collaborative design, modelling, fabrication and packaging study of incorporating piezoelectric thin films onto silicon microstructures to demonstrate useful high-frequency components for microwave circuits.Analytical and FE modelling techniques will be applied at Nottingham University to investigate a range of micromachined structures that can be actuated in a controlled fashion. Particular emphasis will be placed on structures relevant to microwave switches, voltage-tunable capacitors and micromechanical resonators for filter applications. Design rules will be developed where possible.At Cranfield University patterning and etching techniques will be developed to allow fabrication of a piezoelectrically actuated microwave microswitch. Packaging studies will be undertaken by Micro Circuit Engineering (MCE) and the device incorporated into a MCE and MMS designed microwave circuit for testing at Cranfield. MMS will undertake space qualification and testing.The feasibility of using the technology developed in the programme as a means to produce novel micro-mechanical resonators and filters and voltage controlled capacitors will be assessed by modelling studies and taking into account the findings from fabrication of the microswitch.
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Further Information:  
Organisation Website: http://www.cranfield.ac.uk