| EPSRC Reference: |
GR/L24502/01 |
| Title: |
SUB-MICRON OPTICAL LITHOGRAPHY AT IMPERIAL COLLEGE |
| Principal Investigator: |
Thorton, Dr T |
| Other Investigators: |
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| Department: |
Electrical and Electronic Engineering |
| Organisation: |
Imperial College London |
| Scheme: |
JREI |
| Starts: |
10 June 1997 |
Ends: |
09 June 1998 |
Value (£): |
43,000
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Summary on Grant Application Form |
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A state-of-the-art, sub-micron optical mask aligner will enhance the existing fabrication facilities at Imperial, allowing the College to stay at the leading edge of technology for the next ten years. It will be used in a number of inter-disciplinary research projects including novel circuit design, microsystems technology, studies of high temperature superconductors and advanced semiconductors. The aligner will also serve as a focus for activity in the soon to be established Centre for Electronic Materials. In this way it will encourage inter-departmental collaboration within the College.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.imperial.ac.uk |