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Researcher Details
 
Name: Dr L Haworth
Organisation: University of Edinburgh
Department: Sch of Engineering
Current EPSRC-Supported Research Topics:

Current EPSRC Support
There is no current EPSRC Support
Previous EPSRC Support
GR/T11531/01 Optimisation of sub-100nm copper-interconnect & photoresist tracks for high-density IC fabrication metrology(C)
GR/S12838/01 PLATFORM: PLATFORM GRANT TO SUPPORT THE DEVELOPMENT OF MICRO/NANO TECHNOLOGY ACROSS A RANGE OF DISCIPLINES(C)
GR/M33280/01 MICRO-CAVITY TECHNIQUES FOR GETTERING TRACE IMPURITIES IN ADVANCED SEMICONDUCTOR DEVICES(P)
GR/L81000/01 DEVELOPMENT OF TEST STRUCTURES FOR CHARACTERISING IC TECHNOLOGIES(C)
GR/H52221/01 TEACHING COMPANY SCHEME WITH EKC TECHNOLOGY LTD AND EDINBURGH UNIVERSITY(C)
GR/G28062/01 DEVELOPMENT AND SUPPORT FOR THE EDINBURGHMICROFABRICA TION FACILITY(C)
GR/F30499/01 DEVELOPMENT AND SUPPORT FOR THE EDINBURGH MICROFABRICATION FACILITY(C)
Key: (P)=Principal Investigator, (C)=Co-Investigator, (R)=Researcher Co-Investigator