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Researcher Details
 
Name: Dr M Flowers
Organisation: University of Southampton
Department: Sch of Chemistry
Current EPSRC-Supported Research Topics:

Current EPSRC Support
There is no current EPSRC Support
Previous EPSRC Support
GR/J26731/01 PLASMA ETCHING:ENERGIES OF IONS/NEUTRALS AT ELECTRODES AND MECHANISM/MONITORING/CONTROL OF SIGE ETCHING(P)
GR/G18179/01 MECHANISM, MONITORING & CONTROL OF PLASMA ETCHING IN SEMICONDUCTOR DEVICES PROCESSING(P)
Key: (P)=Principal Investigator, (C)=Co-Investigator, (R)=Researcher Co-Investigator