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| Name: |
Dr M Flowers |
| Organisation: |
University of Southampton |
| Department: |
Sch of Chemistry |
| Current EPSRC-Supported Research
Topics: |
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| Current EPSRC Support |
| There is no current EPSRC Support |
| Previous EPSRC Support |
| GR/J26731/01 | PLASMA ETCHING:ENERGIES OF IONS/NEUTRALS AT ELECTRODES AND MECHANISM/MONITORING/CONTROL OF SIGE ETCHING | (P) |
| GR/G18179/01 | MECHANISM, MONITORING & CONTROL OF PLASMA ETCHING IN SEMICONDUCTOR DEVICES PROCESSING | (P) |
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Key: (P)=Principal Investigator, (C)=Co-Investigator, (R)=Researcher Co-Investigator
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