|
| Name: |
Mr A Blackburn |
| Organisation: |
University of Southampton |
| Department: |
Sch of Electronics and Computer Sci |
| Current EPSRC-Supported Research
Topics: |
|
| Current EPSRC Support |
| There is no current EPSRC Support |
| Previous EPSRC Support |
| GR/J26731/01 | PLASMA ETCHING:ENERGIES OF IONS/NEUTRALS AT ELECTRODES AND MECHANISM/MONITORING/CONTROL OF SIGE ETCHING | (C) |
| GR/G18179/01 | MECHANISM, MONITORING & CONTROL OF PLASMA ETCHING IN SEMICONDUCTOR DEVICES PROCESSING | (C) |
|
|
Key: (P)=Principal Investigator, (C)=Co-Investigator, (R)=Researcher Co-Investigator
|
| |
|
|
|
|