| EPSRC Reference: |
GR/T23381/01 |
| Title: |
Probing the Physics & Technology of Next-Generation Device Dielectrics |
| Principal Investigator: |
Coleman, Professor P |
| Other Investigators: |
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| Department: |
Physics |
| Organisation: |
University of Bath |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 2004 |
Ends: |
30 September 2006 |
Value (£): |
130,006
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| No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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Although urgently needed to replace silicon dioxide in conventional MOSFET device structures within a few years, high dielectric constant (high-k) films still have a largely unknown detailed physical structure and uncontrollable electrical properties. This new collaboration will attack this crucial problem by bringing together physicists at Bath and electronic engineers in Newcastle who will form a ground-breaking team to investigate fundamental science issues that currently restrict the performance of device structures incorporating high-k films. This collaboration will be the first in which the electrical characteristics of these important technological films will be correlated with the possible formation, migration, complexing, agglomeration and annealing of vacancies observed via implanted positron assay; the investigators aim to cast new light on the link between structure and performance of these films and to formulate methods for improving the former and enhancing the latter. Conventional beam-based positron spectroscopy will be extended to include (a) studies while the samples are under varying electrical bias and (b) elemental specificity via coincidence Doppler broadening spectroscopy. The potential of the unique Bath compact positron beam spectrometer for the monitoring of high-k film quality will be assessed.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.bath.ac.uk |