| EPSRC Reference: |
GR/T11531/01 |
| Title: |
Optimisation of sub-100nm copper-interconnect & photoresist tracks for high-density IC fabrication metrology |
| Principal Investigator: |
Walton, Professor AJ |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Engineering |
| Organisation: |
University of Edinburgh |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 January 2005 |
Ends: |
30 June 2006 |
Value (£): |
62,015
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
VLSI Design |
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| EPSRC Industrial Sector Classifications: |
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Summary on Grant Application Form |
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This proposal brings together NIST, the Universities of Edinburgh and George Washington in an international research programme with two major objectives. The first is to underpin the research required for developing CD standards for future roadmap nodes with the second being to use the resulting structures and technology to initiate research on some of the more fundamental aspects of Cu based interconnect. The technology is based upon the ability to fabricate tracks and grooves with vertical sidewalls in single crystal silicon. The width of tracks can be determined using TEM technology by counting the atoms across the width of the track and multiplying by the atomic. With the completely rectangular crosssection there is the possibility of relating the resistance of the track to the TEM measured linewidth.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ed.ac.uk |