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Details of Grant 

EPSRC Reference: GR/S97293/01
Title: Innovative Manufacturing Centre Proposal: Novel manufacturing processes for functional multilayer oxide thin films
Principal Investigator: Chalker, Professor PR
Other Investigators:
Researcher Co-Investigators:
Project Partners:
SAFC Hitech
Department: School of Engineering
Organisation: University of Liverpool
Scheme: Standard Research (Pre-FEC)
Starts: 01 July 2003 Ends: 31 July 2006 Value (£): 296,731
EPSRC Research Topic Classifications:
Materials Characterisation Materials Synthesis & Growth
EPSRC Industrial Sector Classifications:
Manufacturing Chemicals
Electronics Healthcare
Related Grants:
Panel History:  
Summary on Grant Application Form
The aim of this proposal is to develop an advanced liquid injection MOCVD technique to manufacture multilayers of complex oxides. To achieve these goals we have selected three systems for proof-of-principle studies. One system focuses on the development of liquid injection CVD as a manufacturing route to novel optoelectronic materials for Bragg reflector; the second targets nanometre scale control of oxide gates dielectrics for next generation CMOS technology; the third addresses the manufacture of new phases of oxide materials not accessible by other processing routes. This proposal brings together the disciplines of manufacturing engineering, materials and chemistry in the pursuit of an improved manufacturing processes for functional multilayer oxide thin films at lower temperatures and / or with complex compositions. Achievement of these goals will significantly enhance the prospect of integrating oxide materials with conventional substrate materials used in electronics, optical devices, sensors, actuators and medical instruments.
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Further Information:  
Organisation Website: http://www.liv.ac.uk