| EPSRC Reference: |
GR/S84156/01 |
| Title: |
Low temperature micromoulding of functional ceramic devices |
| Principal Investigator: |
Dorey, Professor RA |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Industrial and Manufacturing Scie |
| Organisation: |
Cranfield University |
| Scheme: |
First Grant Scheme Pre-FEC |
| Starts: |
04 October 2004 |
Ends: |
03 April 2008 |
Value (£): |
125,410
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Summary on Grant Application Form |
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It is envisaged that, in the near future, micro-electromechanical systems (MEMS) will undergo a significant technological revolution akin to that of the microprocessor. MEMS have a very diverse range of applications ranging from transport and leisure to medicine and communications. To fully realise the future of MEMS, new processing techniques must be developed to allow greater material integration and more complex geometries to be fabricated on a finer scale.This work aims to develop a technique that will provide a route whereby functional ceramic components will be processed together with metallic interconnects and low temperature substrate materials (e.g. silicon and glass). This activity will deliver a process capable of producing functional ceramic components with micron level resolution and feature size, and complex structures. Such fine scale features would lend themselves to novel 'in plane' controlled systems. The development of techniques for the deposition of the required vertical electrode structures, with possible ceramic/metal co-processing, would be of considerable technological interest. These factors combine to make this work extremely pertinent to the future development of the UK's MEMS activity.The work uses a combination of micron scale casting, low temperature ceramic composite sol gel processing, freeform fabrication, and novel vertical electrode deposition to deliver a large range of novel structures.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cranfield.ac.uk |