| EPSRC Reference: |
GR/S45034/01 |
| Title: |
Ferroelectric Thin Films for MEMS - Electrical and mechanical properties |
| Principal Investigator: |
Reece, Professor M |
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| Department: |
Materials |
| Organisation: |
Queen Mary University of London |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 2003 |
Ends: |
30 September 2006 |
Value (£): |
128,353
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
Materials Synthesis & Growth |
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Summary on Grant Application Form |
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Ferroelectric thin films are critical to the emerging nano-technologies of microelectromechanical system (MEMS) and nonvolatile ferroelectric memories (feRAMs). Understanding their electromechanical behaviour is essential for both designing devices and ensuring their reliability. The objective of the research is to investigate ferroelectric thin films using nanoindentation methods. This will require the development of models to describe the interaction of complex stress fields with the anisotrpoic properties of the films. The results from this work will improve our understanding of the relationships between the elastic and peizoelectric properties and the processing, microstructure, crystal structure, crystallographic orientation and electrical properties of perovskite FE thin films. Ferroelectric and ferroelectric relaxor compositions will be studied on different crystal substrates (e.g. platinised silison and MgO or SrTiO3 substrates) The work will also provide the elastic and electromechanical data that are required to optimise the design of MEMS devices. The proposed research involves collaboration between QMUL and Cranfield University and brings together considerable expertise to provide new solutions in this increasingly important area.
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Key Findings |
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Potential use in non-academic contexts |
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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