Details of Grant 

EPSRC Reference:	GR/S31280/01
Title:	EPSRC Microelectronics Fabrication Facility
Principal Investigator:	Evans, Professor A
Other Investigators:	Kraft, Professor M de Groot, Professor C Parker, Professor G Bagnall, Professor D Melvin, Dr T charlton, Professor MDB Ashburn, Professor P
Researcher Co-Investigators:	Dr G Ensell
Project Partners:
Department:	Electronics and Computer Science
Organisation:	University of Southampton
Scheme:	Standard Research (Pre-FEC)
Starts:	01 August 2003	Ends:	31 March 2004	Value (£):	4,184,468
EPSRC Research Topic Classifications:	Bioelectronic Devices Electronic Devices & Subsys. Materials Characterisation Materials Processing Materials Synthesis & Growth Microsystems Optical Devices & Subsystems Optoelect. Devices & Circuits RF & Microwave Technology VLSI Design
EPSRC Industrial Sector Classifications:	Electronics
Related Grants:
Panel History:
Summary on Grant Application Form
This proposal is for a grant to update the EPSRC Silicon Fabrication Facility to meet user demand and to support its operation over the next four years. The vision of the Facility is for a broad-based capability that is able to meet the demands of users in the new research areas that are currently revolutionising the silicon industry: photonic devices, smart power, MEMS, biological devices, micro systems, nano devices, end-of-roadmap CMOS, post-CMOS devices and SiGe rf. Equipment and staff are requested to provide reduced batch cycle times and funds are requested to allow user research students and RA's rapid access to the Facility. The aim is to dramatically cut the time from the original idea to first devices, so that users can rapidly patent and publish novel device concepts. The equipment requested will also deliver smaller geometries, shallower junctions and a broader range of materials. These capabilities will allow users to access the technologically important nanometer dimensions that are needed for advanced silicon-based devices and provide the flexibility required to create novel devices for the growing multi-disciplinary areas including MEMS and the Life Sciences.
Key Findings
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Potential use in non-academic contexts
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Impacts
Description This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk Summary Date Materialised
Sectors submitted by the Researcher
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Project URL:
Further Information:
Organisation Website:	http://www.soton.ac.uk