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Details of Grant 

EPSRC Reference: GR/S25425/01
Title: Development of large area pulsed deposition systems
Principal Investigator: Bradley, Professor JW
Other Investigators:
Researcher Co-Investigators:
Project Partners:
Advanced Energy Industries GmbH Gencoa Ltd Pilkington
Valmet General Ltd
Department: Physics and Astronomy
Organisation: University of Manchester, The
Scheme: Standard Research (Pre-FEC)
Starts: 09 January 2004 Ends: 31 August 2004 Value (£): 50,831
EPSRC Research Topic Classifications:
Materials Characterisation Materials Processing
Materials Synthesis & Growth
EPSRC Industrial Sector Classifications:
Electronics Construction
Related Grants:
Panel History:  
Summary on Grant Application Form
The large area deposition of functional films onto both polymeric web and plate glass substrates has been a major area of growth in recent years. Driving this growth has been the development of the mid-frequency (20-350 kHz) dual bipolar pulsed magnetron sputtering process, which now permits complex, multi-layer structures with specific properties to be routinely deposited in high throughput systems. There are, though, several variants oft dual bipolar process currently employed, with each variant imposing its own set of criteria in terms of cost, process stability, throughput and product performance. However, understanding of the underlying science lags behind the applications, which limits the ability to design and optimise novel technological systems. Thus, at present there is a lack of detailed understanding of many fundamental aspects of this complex process. This propc seeks to address this issue through detailed studies of the role played by specific elements of the process, including magnetron design and configuration, driving voltage waveforms, anode design and configuration and power deposition and dissipation within the system. We will perform ti studies in an industrially relevant deposition system, which will then permit technology transfer to take place to pilot scale production facilities at our collaborators establishments
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Organisation Website: http://www.man.ac.uk