| EPSRC Reference: |
GR/S09340/01 |
| Title: |
UHV STM/SEM FOR ADVANCED FUNCTIONAL MATERIALS RESEARCH |
| Principal Investigator: |
Silva, Professor SRP |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Electronics & Physical Sciences |
| Organisation: |
University of Surrey |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 April 2003 |
Ends: |
31 March 2006 |
Value (£): |
839,721
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| EPSRC Research Topic Classifications: |
| Bioelectronic Devices |
Displays |
| Electronic Devices & Subsys. |
Materials Characterisation |
| Medical science & disease |
Optoelect. Devices & Circuits |
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| EPSRC Industrial Sector Classifications: |
| Electronics |
No relevance to Underpinning Sectors |
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| Related Grants: |
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| Panel History: |
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Summary on Grant Application Form |
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This Mufti-Project Equipment bid for a state-of-the-art UHV STM/SEM for Advanced Functional Materials Research is spearheaded by the immediate need for a fundamental understanding of the dopant distribution in ultra-shallow junctions for semiconductors, with a number of other key projects also being identified on a slightly longer term. The funding requested is for the capital equipment and a experienced PDRA to develop the scientific programmes associated with the new instrument. The equipment will be housed in a state of the art Advanced Technology Institute (10M JIF bid), that will bring together over a 100 researchers working in solid state electronics under one roof, and will also guarentee the continued use of the equipment long term for very diverse applications. Close to 0.5M in cash has been donated to the project by the university and manufacturers of equipment showing their confidence in the activity being proposed at Surrey. The interdisciplinary nature of the projects proposed and the diversity of the researchers being represented by the investigators underlines the project's suitablity for mufti-project funding, with the diversity in programmes highlighted by the objectives shown above. STM of clean surfaces is able to detect the x -y and z distributions of impurities spacially by the position and strength of the respective Coulomb field at the surface. The addition of an in-situ RIE, together with FEG SEM with an attached energy analyser improves the versatility of the system beyond most other precision metrology systems available world-wide. Clear routes to exploit the results of the research together with our industrial partners have been identified.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.surrey.ac.uk |