| EPSRC Reference: |
GR/S08329/01 |
| Title: |
3DI - The deposition of fine-pitch electronic connections over non-planar surfaces and within volumes |
| Principal Investigator: |
Purvis, Professor A |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Engineering and Computing Sciences |
| Organisation: |
Durham, University of |
| Scheme: |
Faraday (PreFEC) |
| Starts: |
01 April 2003 |
Ends: |
31 March 2006 |
Value (£): |
168,823
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| EPSRC Research Topic Classifications: |
| Design & Testing Technology |
Electronic Devices & Subsys. |
| VLSI Design |
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Summary on Grant Application Form |
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This research programme is concerned with the development of a novel method for realising fine-pitch electrical connections over non-planar surface: and within volumes. The programme involves, in addition to modified optical techniques, the use of novel photolithographic methods utilising compute designed holographic masks. Standard photoloithographic techniques are limited by de-focussing effects when imaging non-planar surfaces, howeve holographic masks can correct this problem.The main issues that will be addressed are:the computer design of holograms describing three dimensional electrical routing (and their subsequent production using an electron beam mask machine)the uniform plating of metals and dielectrics onto non-planar surfaces
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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