| EPSRC Reference: |
GR/R51544/01 |
| Title: |
MPE: HARM Technologies for optical and rf competents |
| Principal Investigator: |
Syms, Professor R |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Electrical and Electronic Engineering |
| Organisation: |
Imperial College London |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
18 March 2002 |
Ends: |
17 March 2005 |
Value (£): |
636,196
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Summary on Grant Application Form |
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Microsystems Technology (MST) is a rapidly growing field, with major applications in many industries. The Optical and Semiconductor Devices Group of the Imperial College EEE Dept. have established a nationally leading MST activity, based on a fabrication facility that has been built up piecemeal. This proposal is a request for a single item of modern semiconductor process equipment, a Surface Technology Systems Single Chamber Multiplex ICP Etcher, which can form high aspect ratio microstructures (HARM) in single crystal silicon. Technical support for three years is also requested. The equipment will be used to support 10 existing research grants (8 x EPSRC, 1 x CEC, 1 x industrial), and will enable advances several fields, including mechanical, optical, electrical and micro-analytical devices. Significant applications are envisaged in optical and RF communications. Deep, movable microstructures formed in high quality material will be used as a basis for a wide variety of tuneable components. Example optical applications include adjustable (and subsequently fixable) optical micro-benches, tuneable Fabry-Perot filters and external cavity lasers. Example electrical applications include micro-power generation devices, micro-connectors, circuit breakers and protection devices, switches, low-loss tuneable capacitors and inductors, and high-order electromechanical filters for signal processing.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.imperial.ac.uk |