| EPSRC Reference: |
GR/R47899/01 |
| Title: |
Investigation of the Pulsed Magnetron Discharge by Time and Energy-Resolved Mass Spectrometry |
| Principal Investigator: |
Bradley, Professor JW |
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| Department: |
Physics |
| Organisation: |
UMIST |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
06 November 2001 |
Ends: |
05 December 2001 |
Value (£): |
2,212
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Summary on Grant Application Form |
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In this short collaborative programme, we plan to carry out a detailed study of the energetics of plasma species arriving at a substrate in a pulsed magnetron discharge. Pulsed reactive and non-reactive sputtering has become a hugely important technique in the production of quality thin films and coatings, particularly optical coatings. However, knowledge of the energy and flux of the ionic and neutral species arriving at the growing film in the pulsed environment is still poor.We will development an existing commercial energy-resolved mass spectrometer (EQP 300) so that we can perform fast time resolved measurements during the pulse (1-50 kHz). A titanium target will be used, for both non-reactive (argon) and reactive (argon + oxygen, nitrogen and methane) plasmas.Of particular interest is the energy distribution, flux and relative arrival times of: i) the sputtered Ti atoms, ii) ionised sputtered material, iii) the sputtering gas background (either atomic, molecular or ionic) and iv) energetic reflected Ar atoms from the target, for different discharge powers, pressures, pulse frequencies and duty cycles.No such measurements have been published to date.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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