| EPSRC Reference: |
GR/R24678/01 |
| Title: |
Microfabricated Trench Etched Resonating Pressure Sensor (TERPS) |
| Principal Investigator: |
Ward, Dr M |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Mechanical Engineering |
| Organisation: |
University of Birmingham |
| Scheme: |
LINK |
| Starts: |
01 September 2001 |
Ends: |
31 August 2004 |
Value (£): |
126,960
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| EPSRC Research Topic Classifications: |
| Instrumentation Eng. & Dev. |
Microsystems |
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| EPSRC Industrial Sector Classifications: |
| Aerospace, Defence and Marine |
Manufacturing |
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| Related Grants: |
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Summary on Grant Application Form |
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We propose to develop a range of high precision resonant silicon pressure sensors. The project will be all embracing considering fundamental non linear mechanical design to manufacturing processes, The following key elements are included 1) The effect of the inherent non-linearities in tree resonant structure and the response to environmental effects such as shock, vibration, thermal cycling etc. 2) The mechanical stability of the complete packaged sensor system, including bond joints etc. 3) The design optimisation of the DRIE process. DRIE etching is emerging as a standard micro-engineering process, however the resonators considered in this study will push the technology to the limit in terms machining and reproducibility. 4) Second order effects will need to be controlled if a high performance is to be achieved. The accuracy of the deep trench etched features and of the alignment of bonded wafers. 5)The design of a resonator for the differential pressure sensor that Is contained in an evacuated cavity strong enough to withstand the high line pressure.The key missing process step (2 above , will be developed, is fusion bonding with alignment, and, in the process, to form Sealed evacuated cavities.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.bham.ac.uk |