| EPSRC Reference: |
GR/R23312/01 |
| Title: |
2300C Diffusion and Annealing Furnace |
| Principal Investigator: |
Wilkinson, Professor J |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Optoelectronics Research Ctr (closed) |
| Organisation: |
University of Southampton |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
21 June 2001 |
Ends: |
20 June 2004 |
Value (£): |
86,363
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
Optoelect. Devices & Circuits |
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| EPSRC Industrial Sector Classifications: |
| Manufacturing |
Communications |
| Environment |
Healthcare |
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| Related Grants: |
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| Panel History: |
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Summary on Grant Application Form |
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The purpose of this proposal is to provide new complementary facilities for the Optoelectronics Research Centre and the Southampton Microelectronics Centre and their users and collaborators to enable annealing and diffusion in a wide range of materials at up to 2300C in vacuo or in an inert gas and up to 1650C in oxygen. This facility will enable high-temperature diffusion of dopants into wafers of dielectric materials to realise photonic devices such as tunable integrated Ti:Sapphire lasers, rare-earth-doped photonic crystal circuits, and high-power diode-pumped waveguide lasers. These applications require high diffusion temperature in a well-controlled atmosphere and 3 wafer size to integrate multiple components on the wafer. Access to higher temperatures will also enable production of novel multicomponent glasses and optical fibres for telecommunications applications, particularly optical amplifiers at new wavelengths, and novel athermal glasses with UV sensitivity for waveguide grating filters with low temperature sensitivity and for 2D and 3D directly UV written waveguides. Work in the Microelectronics Centre will include annealing at high temperatures in a well-controlled inert atmosphere for Si-Ge on insulator devices, advanced work on high-temperature processing of silicon carbide, and processing of active waveguide materials for photonic crystal circuits.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.soton.ac.uk |