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Details of Grant 

EPSRC Reference: GR/R23312/01
Title: 2300C Diffusion and Annealing Furnace
Principal Investigator: Wilkinson, Professor JS
Other Investigators:
Hewak, Professor D Shepherd, Professor DP Taylor, Dr E
Evans, Professor A Sheperd, Dr D
Researcher Co-Investigators:
Project Partners:
Department: Optoelectronics Research Centre
Organisation: University of Southampton
Scheme: Standard Research (Pre-FEC)
Starts: 21 June 2001 Ends: 20 June 2004 Value (£): 86,363
EPSRC Research Topic Classifications:
Materials Characterisation Optoelect. Devices & Circuits
EPSRC Industrial Sector Classifications:
Environment Healthcare
Manufacturing Communications
Related Grants:
Panel History:  
Summary on Grant Application Form
The purpose of this proposal is to provide new complementary facilities for the Optoelectronics Research Centre and the Southampton Microelectronics Centre and their users and collaborators to enable annealing and diffusion in a wide range of materials at up to 2300C in vacuo or in an inert gas and up to 1650C in oxygen. This facility will enable high-temperature diffusion of dopants into wafers of dielectric materials to realise photonic devices such as tunable integrated Ti:Sapphire lasers, rare-earth-doped photonic crystal circuits, and high-power diode-pumped waveguide lasers. These applications require high diffusion temperature in a well-controlled atmosphere and 3 wafer size to integrate multiple components on the wafer. Access to higher temperatures will also enable production of novel multicomponent glasses and optical fibres for telecommunications applications, particularly optical amplifiers at new wavelengths, and novel athermal glasses with UV sensitivity for waveguide grating filters with low temperature sensitivity and for 2D and 3D directly UV written waveguides. Work in the Microelectronics Centre will include annealing at high temperatures in a well-controlled inert atmosphere for Si-Ge on insulator devices, advanced work on high-temperature processing of silicon carbide, and processing of active waveguide materials for photonic crystal circuits.
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Summary
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Further Information:  
Organisation Website: http://www.soton.ac.uk