| EPSRC Reference: |
GR/R15658/01 |
| Title: |
Supply of An Unique Face Grinding Machine To Support Research In Novel Ultra Precision Machining Processes |
| Principal Investigator: |
Corbett, Professor J |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Industrial and Manufacturing Scie |
| Organisation: |
Cranfield University |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
09 October 2000 |
Ends: |
08 May 2001 |
Value (£): |
58,994
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| EPSRC Research Topic Classifications: |
| Manufacturing Machine & Plant |
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Summary on Grant Application Form |
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Cranfield University has a unique opportunity to acquire a Wafer Face Grinding Machine recently designed and built by Cranfield Precision, Division of Landis-Lund. The machine was developed, as a cost approaching 1.2 million, to face grind 300mm diameter semiconductor wafers in an automatic routine. The processing technology, utilised on the machine, has the potential to produce super flat wafers which require substantially less polishing and etching. Benefits arising from the process include major reductions in processing times, costs and environmental improvements. In May 1999 the applicants took delivery of Tetraform 'C', a novel ultra precision grinding machine, following an award through the JREI scheme. Tetraform 'C' was developed essentially to undertake fundamental ultra precision machining research, which it is doing extremely successfully. However its volumetric and geometric capability is limited by 3 linear axes and it does not incorporate a rotary table as does the Wafer Face Grinder (WFG). The WFG would strengthen the research capability of the applicants, by providing a means to planarise thin coated films and other materials, and to prepare such surfaces for practical applications. The availability to utilise both Tetraform 'C' and the WFG would provide the UK with a unique and world class ultra precision machining research facility, which can be used to advance knowledge and technology and provide trained engineers and scientists, in the efficient processing of advanced materials, to contribute to the competitiveness of the UK.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cranfield.ac.uk |