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Details of Grant 

EPSRC Reference: GR/R01477/01
Title: Micromachined Silicon Ultrasonic Transducer Arrays
Principal Investigator: Hutchins, Professor D
Other Investigators:
Billson, Dr DR
Researcher Co-Investigators:
Project Partners:
Defence Science and Technology Laborator University of Warwick
Department: Sch of Engineering
Organisation: University of Warwick
Scheme: Standard Research (Pre-FEC)
Starts: 01 November 2000 Ends: 31 October 2003 Value (£): 144,944
EPSRC Research Topic Classifications:
Instrumentation Eng. & Dev. Microsystems
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
Panel History:  
Summary on Grant Application Form
The research will investigate the properties of ultrasonic transducer arrays, using CMOS processes in silicon to fabricate capacitive devices. The devices will be made at DERA Malvern, using their extensive microfabrication facilities, but designed and tested at Warwick University. Individual transducer elements up to 5mm wide will be tested, and their performance optimised in terms of sensitivity and bandwidth over the 500kHz to 10MHz frequency range. These will then be formed into both linear and rectangular arrays. This is the first time that devices of this size and bandwidth have been micromachined from silicon and incorporated into arrays. The arrays will be waterproofed and tested in water. Configurations of interest include an apodised immersion transducer, an active linear phased array for possible imaging applications, and a passive 2D array for use as an ultrasonic camera.
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Further Information:  
Organisation Website: http://www.warwick.ac.uk