EPSRC logo

Details of Grant 

EPSRC Reference: GR/N66773/01
Title: APPLICATIONS OF OPTICAL REFLECTOMETRY IN MOVPE OF GROUP III NITRIDE SEMICONDUCTORS
Principal Investigator: Watson, Dr I
Other Investigators:
Researcher Co-Investigators:
Project Partners:
SAFC Hitech
Department: Physics
Organisation: University of Strathclyde
Scheme: Fast Stream
Starts: 13 November 2000 Ends: 12 November 2002 Value (£): 61,317
EPSRC Research Topic Classifications:
Materials Synthesis & Growth
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
Panel History:  
Summary on Grant Application Form
The proposed work will apply optical reflectometry to monitoring growth of group III nitride semiconductors by metal organic vapour phase epitaxy (MOVPE). This non-perturbative monitoring technique has proven ability to make real-time, in situ studies of MOVPE processes, yielding important mechanistic insights. The overall aim of this programme is to develop the capabilities of a recently commissioned MOVPE system for producing device-quality material, simultaneously demonstrating novel applications of the reflectrometry technique. The programme will also employ a number of ex situ characterisation techniques to augment the information obtained from in situ monitoring. Initial work will apply single-wavelength reflectometry to monitoring heteroepitaxial growth of gallium nitride on sapphire, building on previous work on this topic. A further work package will extend this technique to monitoring lateral epitaxial overgrowth, which is currently the most important route to dislocation-free layers of nitride semiconductors. Finally, spectroscopic and multi-wavelength reflectrometry will be used to study growth of ternary and quaternary indium-containing alloys. The aim of this work package will be to develop near-simultaneous monitoring of the thickness and composition of alloy layers.
Key Findings
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Potential use in non-academic contexts
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Impacts
Description This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Summary
Date Materialised
Sectors submitted by the Researcher
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Project URL:  
Further Information:  
Organisation Website: http://www.strath.ac.uk