| EPSRC Reference: |
GR/N64397/01 |
| Title: |
SUBSTRATE CROSS-TALK SUPRESSION STUDIES ON SILICON-ON- INSULATOR SUBSTRATES WITH BURIED GROUND PLANES (GPSOI |
| Principal Investigator: |
Gamble, Professor H |
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| Department: |
Sch of Electronics, Elec Eng & Comp Sci |
| Organisation: |
Queen's University of Belfast |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 March 2001 |
Ends: |
28 February 2002 |
Value (£): |
54,051
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| EPSRC Research Topic Classifications: |
| System on Chip |
VLSI Design |
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| EPSRC Industrial Sector Classifications: |
| No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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This collaborative project will investigate the potential application of buried metal silicide ground planes in SOI substrates for minimising cross-talk in high frequency rf/microwave circuits. In these systems it is desirable to integrate both digital and analogue parts. Special test structures with a standard layout will be fabricated so that the cross-talk suppression can be measured and compared to that obtained from other technologies. The SOI substrates with buried ground planes (GPSOI) will be produced by CVD tungsten silicide and direct silicon wafer bonding at Queen's. The test devices will range from standard SOI with back contacted ground planes to Faraday cage-like structures with grounded surface connections. Special test structures with patterned ground planes underneath spiral inductors will be used to optimise inductance, cros-talk, and inductor quality factor Q. Fabrication of planarised two-layer metal inductors will also be carried out at Southampton on the patterned ground plane GPSOI. Extensive numerical multi-dimensional electromagnetic simulations will be conducted at Southampton to provide guidance on optimum layouts and also to aid understanding of the critical parameters. Rf/microwave measurements of the experimental structures will be conducted at Southampton up to 50 GHz.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.qub.ac.uk |