| EPSRC Reference: |
GR/N36080/01 |
| Title: |
MICROMACHINED LEVIATED DISK |
| Principal Investigator: |
Kraft, Professor M |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Electronics and Computer Science |
| Organisation: |
University of Southampton |
| Scheme: |
Fast Stream |
| Starts: |
15 January 2001 |
Ends: |
14 January 2003 |
Value (£): |
63,190
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| EPSRC Research Topic Classifications: |
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| EPSRC Industrial Sector Classifications: |
| Manufacturing |
Communications |
| Healthcare |
Pharmaceuticals and Biotechnology |
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| Panel History: |
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Summary on Grant Application Form |
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This programme is aimed to investigate electrostatic levitation for microelectromechanical systems (MEMS). A micromachined disk is envisaged that is levitated between sets of electrodes above, below and its periphery. Capacitive measurements determine the position of the disk and apply voltages to the electrodes to maintain the disk at mid-position. One potential application is a multi-axis accelerometer with dynamic adjustment of sensitivity and bandwidth since the effective spring constant depends only on the control voltages. For the fabrication a new process will be developed based upon electroplating into moulds formed by thick-film resist. The development of a suitable control strategy and its electronic realisation is of crucial importance. A multi-axis feedback loop based upon the incorporation of the disk into a sigma-delta modulator architecture is envisaged. An important aspect of the project is the simulation and modelling of the entire system. A second prototype will be designed that is capable of applying torque to the disk generated by electrostatic forces to make it spin about its main axis. Important parameters to be investigated are the maximum spin speed, the robustness against external forces and system stability. The same device will be used to explore the feasibility of measuring gyroscopic motion.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.soton.ac.uk |