| EPSRC Reference: |
GR/N14682/01 |
| Title: |
ELECTRON BEAM NANOFABRICATION OF METALLIC STRUCTURES IN METAL-CHALCOGENIDE BILAYERS |
| Principal Investigator: |
Fitzgerald, Professor AG |
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| Department: |
Electronic Engineering and Physics |
| Organisation: |
University of Dundee |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 April 2000 |
Ends: |
30 June 2003 |
Value (£): |
256,769
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
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| EPSRC Industrial Sector Classifications: |
| Electronics |
No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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We have demonstrated that silver and copper nanostructures can be formed by a focused electron beam directed onto metal-amorphous chalcogenide bilayers on suitable substrates. In this research project we propose to investigate and determine the mechanism of formation of these metal nanostructures. The bilayers that will be studied will include a chalcogenide film of e.g. arsenic trisulphide, arsenic triselenide, germanium sulphide or germanium selenide in contact with a metal film. Initially a film of silver, copper, gold, indium, palladium or platinum will form the metal component. The composition, structure and form will be characterised by electron microscopy (TEM and SEM), x-ray microanalysis, Auger electron spectroscopy, atomic force microscopy and scanning tunnelling microscopy. Parameters that influence the growth and size of the metal nanostructures will be studied. These include electron beam accelerating voltage, electron probe size and the electron dose delivered to the film. The suitability of particular metal nanostructures will be investigated for potential applications in optical integrated circuits, solar cells, miniature sensors, meal interconnects in integrated circuits and x-ray masks for fabrication of high device density integrated circuits. For example, for metal interconnects, the conditions for formation of copper nanolines of substantial thickness and high aspect ratio will be investigated.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.dundee.ac.uk |