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Details of Grant 

EPSRC Reference: GR/N06489/01
Title: THE DEVELOPMENT OF FOCUSED ION BEAM NANOFABRICATION FOR MATERIALS CHARACTERISATION AND DEVICE PROCESSING
Principal Investigator: Blamire, Professor M
Other Investigators:
Greer, Professor AL Midgley, Professor PA Moore, Dr DF
Humphreys, Professor Sir C
Researcher Co-Investigators:
Project Partners:
Department: Materials Science & Metallurgy
Organisation: University of Cambridge
Scheme: Standard Research (Pre-FEC)
Starts: 23 April 2000 Ends: 22 April 2003 Value (£): 245,529
EPSRC Research Topic Classifications:
Materials Processing
EPSRC Industrial Sector Classifications:
Electronics No relevance to Underpinning Sectors
Related Grants:
Panel History:  
Summary on Grant Application Form
The EPSRC-funded focused ion beam (FIB) workstation has become a mainstay for many aspects of work in the Cambridge University. As we have gained familiarity with the equipment, we have been able to devote more effort towards exploring new methods of suing its capabilities. It has become clear that established techniques for materials characterisation and nanofabrication have scope for dramatic development and improvement. For example although the fabrication of cross-sectional TEM specimens is currently the largest application area of research FIB systems, the degree of material damage induced is poorly understood and neither systematic characterisation of the degradation or the development of methods for reducing it have been carried out. The aim of this new proposal is to concentrate on the development of such novel aspects of FIB use, to determine the basic science behind some of the existing processes, and to use this understanding to optimise nanofabrication techniques. In addition, funding of this proposal will enable the continued operation of an outstandingly successful piece of research equipment.
Key Findings
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Potential use in non-academic contexts
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Impacts
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Summary
Date Materialised
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Organisation Website: http://www.cam.ac.uk