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Details of Grant 

EPSRC Reference: GR/N06113/01
Title: MICROENGINEERED RADIATION COLLECTOR ARRAYS FOR UNCOOLED THERMAL IR DETECTORS
Principal Investigator: Whatmore, Professor RW
Other Investigators:
Kirby, Dr PB
Researcher Co-Investigators:
Project Partners:
Defence Science and Technology Laborator Infrared Integrated Systems Ltd
Department: Sch of Industrial and Manufacturing Scie
Organisation: Cranfield University
Scheme: Standard Research (Pre-FEC)
Starts: 01 July 2000 Ends: 31 March 2004 Value (£): 275,688
EPSRC Research Topic Classifications:
Microsystems
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
Panel History:  
Summary on Grant Application Form
The proposed project will take ferroelectric thin film technology for the fabrication of thin pyroelectric materials and combine it with deep reactive ion etch technology to form a novel uncooled pyroelectric array structure which will use arrays of conical or parabolic cavities to collect 8 to 12 micron wavelength IR onto small freely suspended thin film pyroelectric elements. It involves a range of technologies, especially thin film oxide ferroelectric deposition by sol gel and the development of a novel variant on DRIE to permit the fabrication of cavities with non-vertical sidewalls of a controlled profile. It will entail the combination of these technologies with other device fabrication processes to allow the manufacture of the complete array. It will also involve the bybridisation of complete 16x16 arrays with an exisitng Si readout chip design. Initially predictions indicate that the structure should give up to a factor of 20 reduction (ie better) noise equivalent power (NEP) in comparison with arrays which do not emply this type of collector.
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Project URL:  
Further Information:  
Organisation Website: http://www.cranfield.ac.uk