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Details of Grant 

EPSRC Reference: GR/M91754/01
Title: (JREI) PIEZOELECTRIC AND FERROELECTRIC DEVICE FABRICATION FACILITY
Principal Investigator: Kirby, Dr PB
Other Investigators:
Whatmore, Professor RW Stephenson, Professor D
Researcher Co-Investigators:
Project Partners:
TDK
Department: Sch of Industrial and Manufacturing Scie
Organisation: Cranfield University
Scheme: JREI
Starts: 01 April 2000 Ends: 31 March 2003 Value (£): 82,285
EPSRC Research Topic Classifications:
Microsystems
EPSRC Industrial Sector Classifications:
Electronics No relevance to Underpinning Sectors
Related Grants:
Panel History:  
Summary on Grant Application Form
The project will entail the purchase of a Stylus Surface Profiler, Plasma Asher and a Reactive Ion Etcher. These items will enhance existing research into ferroelectric thin films, and the processing of micromechanical silicon structures, especially thin film bulk acoustic wave resonators. The proposed equipment purchases will allow the development of processing/fabrication technologies to make use of the piezoelectric, pyroelectric and dielectric properties of thin/thick functional, especially ferroelectric films, on silicon microstructures, with the aim of addressing the burgeoning need for miniature sensors.This equipment will also make a significant contribution to the precision preparation of ceramic and metal surfaces using 'ductile grinding, and to thermal coatings technologies.The 50% contribution from an external sponsor towards the cost of the proposed equipment is from an industrial source.
Key Findings
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Potential use in non-academic contexts
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Impacts
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Summary
Date Materialised
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Project URL:  
Further Information:  
Organisation Website: http://www.cranfield.ac.uk