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Details of Grant 

EPSRC Reference: GR/M85951/01
Title: ACTIVE PIXEL MATRIX FOR ION & NEURAL BEAM PROFILING
Principal Investigator: Rahman, Dr M
Other Investigators:
van den Berg, Professor J Smith, Professor K Wilson, Professor Emeritus J
Researcher Co-Investigators:
Project Partners:
Applied Materials
Department: School of Physics and Astronomy
Organisation: University of Glasgow
Scheme: Standard Research (Pre-FEC)
Starts: 16 October 1999 Ends: 15 October 2000 Value (£): 50,225
EPSRC Research Topic Classifications:
Instrumentation Eng. & Dev.
EPSRC Industrial Sector Classifications:
No relevance to Underpinning Sectors
Related Grants:
Panel History:  
Summary on Grant Application Form
Implant machines are a crucial component in the continued scaling of silicon devices. We propose to develop two types of detector for ion beam monitoring (quality assurance) within implanters, exploting active - or 'smart' - pixel technology.The first exploits a charge-integrating readout architecture, operating much as CCD expect that the readout accepts charge from an external source. The readout will be coupled to a pixellated graphite current collection plane. Such a system would allow real-time monitoring of the ion beam profile and hence permit accurate dosimetry. Such a system would make possible real-time correction of implant profiles in response to beam fluctuations, for example.The second detector exploits an event-counting readout architecture coupled to simiconductor active medium. The intended application is to neutral particle detection in retarding field implanters, where ion neutralisation just prior to the deceleration lens is a potential cause for concern. Neutral particles entering the active medium will generate a 'hit' in the readout. The readout counts the number of hits across the array, giving a neutral beam profile.The pilot study is required for proof-of-principle and to determine the best route for technological exploitation.
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Organisation Website: http://www.gla.ac.uk