| EPSRC Reference: |
GR/M85951/01 |
| Title: |
ACTIVE PIXEL MATRIX FOR ION & NEURAL BEAM PROFILING |
| Principal Investigator: |
Rahman, Dr M |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
School of Physics and Astronomy |
| Organisation: |
University of Glasgow |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
16 October 1999 |
Ends: |
15 October 2000 |
Value (£): |
50,225
|
| EPSRC Research Topic Classifications: |
| Instrumentation Eng. & Dev. |
|
|
| EPSRC Industrial Sector Classifications: |
| No relevance to Underpinning Sectors |
|
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
Implant machines are a crucial component in the continued scaling of silicon devices. We propose to develop two types of detector for ion beam monitoring (quality assurance) within implanters, exploting active - or 'smart' - pixel technology.The first exploits a charge-integrating readout architecture, operating much as CCD expect that the readout accepts charge from an external source. The readout will be coupled to a pixellated graphite current collection plane. Such a system would allow real-time monitoring of the ion beam profile and hence permit accurate dosimetry. Such a system would make possible real-time correction of implant profiles in response to beam fluctuations, for example.The second detector exploits an event-counting readout architecture coupled to simiconductor active medium. The intended application is to neutral particle detection in retarding field implanters, where ion neutralisation just prior to the deceleration lens is a potential cause for concern. Neutral particles entering the active medium will generate a 'hit' in the readout. The readout counts the number of hits across the array, giving a neutral beam profile.The pilot study is required for proof-of-principle and to determine the best route for technological exploitation.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.gla.ac.uk |