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Details of Grant 

EPSRC Reference: GR/M70865/01
Title: ION ASSISTED PROCESSES FOR LOW TEMPERATURE POLYSILICON AMLCD ON PLASTIC
Principal Investigator: Shannon, Professor J
Other Investigators:
Sealy, Professor B Silva, Professor SRP
Researcher Co-Investigators:
Project Partners:
Philips
Department: Sch of Electronics & Physical Sciences
Organisation: University of Surrey
Scheme: Standard Research (Pre-FEC)
Starts: 01 December 1999 Ends: 30 November 2002 Value (£): 153,732
EPSRC Research Topic Classifications:
Materials Processing
EPSRC Industrial Sector Classifications:
Aerospace, Defence and Marine Electronics
Related Grants:
Panel History:  
Summary on Grant Application Form
The main aim of this project is to establish ion-assisted processes for fabricating self-aligned polysilicon TFT addressed AMLCD on plastic substrates. The concept in this approach is to replace the thermal energy needed for a particular process by the energy dissipated by ion bombardment and the consequent non-equilibrium process. We have already shown that active devices for AMLCD can be made at temperatures of ~100 degrees centigrade and highly conducting silicides can be made even at room temperature using ion assisted processes; the aim here is to extend these techniques to polysilicon with a maximum processing temperature of ~150 degrees centigrade. The ability to form polysilicon devices at these low processing temperatures would enable fully integrated AMLCD to be made on the most readily available and inexpensive plastic substrates and bring with it new products that are light rugged and flexible. This project could also provide devices for integration with polymer LEDs and driver and addressing circuitry for field emission displays.
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Organisation Website: http://www.surrey.ac.uk