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Details of Grant 

EPSRC Reference: GR/M70667/01
Title: COMPUTATIONAL MODELLING OF MAGNETRONS
Principal Investigator: Bradley, Professor JW
Other Investigators:
Browning, Professor P
Researcher Co-Investigators:
Project Partners:
Gencoa Ltd
Department: Physics
Organisation: UMIST
Scheme: Standard Research (Pre-FEC)
Starts: 01 October 1999 Ends: 30 September 2002 Value (£): 63,316
EPSRC Research Topic Classifications:
Plasmas - Technological
EPSRC Industrial Sector Classifications:
No relevance to Underpinning Sectors Manufacturing
Related Grants:
Panel History:  
Summary on Grant Application Form
The growth in interest of using magnetron plasma sources for thin film and coatings applications has led to an upsurge in computational modelling of these complex plasmas, both to gain further knowledge of the fundamental plasma processes, and as a predictive tool for design and development. Experimental evidence strongly suggests that particle transport in these plasmas is anomalous with much faster cross-field diffusion rates than prescribed from a classical analysis, however current 1-D PIC-MCC and fluid modelling schemes do not predict this behaviour. In this collaborative project, we will develop two different, but complementary computational models for the same magnetron discharge geometry, consistent with those used in industry. By exploiting an existing research magnetron, fully equipped with electrical and optical diagnostics, we will be able to compare the model results directly with experiment and bench-mark the codes. Ultimately we shall be able to form a complete description of the discharge and predict better the plasma and deposition system performance. For the first time a detailed study of particle diffusion mechanisms will be made, so strengthening greatly the UK activity in both fundamental and applied magnetron research.
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