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Details of Grant 

EPSRC Reference: GR/M69661/01
Title: FUNDAMENTAL MOLECULAR BEAM STUDIES OF ATOM/RADICAL/ ION-INDUCED REACTIONS IN PLASMA-SURFACE INTERACTIONS
Principal Investigator: Gorry, Dr P
Other Investigators:
Smith, Dr D Whitehead, Professor JC
Researcher Co-Investigators:
Project Partners:
Department: Chemistry
Organisation: Victoria University of Manchester, The
Scheme: Standard Research (Pre-FEC)
Starts: 01 March 2000 Ends: 30 November 2003 Value (£): 187,584
EPSRC Research Topic Classifications:
Plasmas - Technological Surfaces & Interfaces
EPSRC Industrial Sector Classifications:
Electronics No relevance to Underpinning Sectors
Related Grants:
Panel History:  
Summary on Grant Application Form
A unique molecular beam-surface scattering apparatus will be developed the study the reactions of atoms, molecular radicals and ions with semiconductor III-V surfaces important in plasma etching. The species that are scattered from the surface will be detected by a high resolution time-of-flight mass spectrometer. The experiment will be able to vary a wide range of parameters (energy, surface temperature, angle of incidence and recoil). Measurements will include identification of reaction products, thermal accommodation coefficients, sticking coefficients, orders of reaction and rate coefficients. The reactive species will include halogen atoms, hydrogen halides and radicals such as SiCl2. Such a study will yield a fundamental insight into the surface chemistry involved in the plasma etching of semiconductors at a molecular level and provide modellers with presently available information.
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