| EPSRC Reference: |
GR/M67506/01 |
| Title: |
PROBING DIAMOND DEPOSITION PLASMA USING CW CAVITY RING-DOWN SPECTROSCOPY |
| Principal Investigator: |
Orr-Ewing, Professor A |
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| Project Partners: |
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| Department: |
Chemistry |
| Organisation: |
University of Bristol |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 1999 |
Ends: |
30 September 2002 |
Value (£): |
137,606
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| EPSRC Research Topic Classifications: |
| Gas & Solution Phase Reactions |
Plasmas - Technological |
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| EPSRC Industrial Sector Classifications: |
| Manufacturing |
No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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The technique of cw cavity ring-down spectroscopy (cw CRDS) will be used in the near infra-red to detect the constituent radicals and molecules present in hydrocarbon plasmas used for chemical vapour deposition (CVD) of diamond films. Methods will be developed using a modified hot-filament reactor in which movement of the filament and substrate permits spatial profiling of the species of interest. Absolute concentrations can be measured with very high sensitivity using cw CRDS and measurement of local temperatures from the Doppler components of spectral line-shapes will be explored. Species probed will include CH4, C2H, CH3 and HCN. Detection will be via vibrational overtone transitions at wavelengths from 1.0 - 1.7 microns. Once the methodology is well-established and accurate measurements have been made on the hot-filament reactor, the spectrometer will be combined with an existing microwave plasma and a DC arc jet CVD apparatus and the concentrations of key species such as CH3 in these technological plasmas examined under conditions used for diamond-film growth.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.bris.ac.uk |