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Details of Grant 

EPSRC Reference: GR/M33518/01
Title: MULTILAYER SOL-GEL PROCESSING OF THICK LEAD ZIRCONATE TITANATE FILMS FOR SENSOR AND ACTUATOR APPLICATIONS
Principal Investigator: Milne, Dr SJ
Other Investigators:
Reaney, Professor IM
Researcher Co-Investigators:
Project Partners:
Filtronic Oxley Developments Co Ltd Patterning Technologies Ltd
Department: Institute of Materials Research
Organisation: University of Leeds
Scheme: Standard Research (Pre-FEC)
Starts: 14 January 1999 Ends: 13 April 2001 Value (£): 129,392
EPSRC Research Topic Classifications:
Materials Processing
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
Panel History:  
Summary on Grant Application Form
The project aims to product lead zirconate titanate (PZT) films in the thickness range 1-10 microns which are suitable for use in integrated sensors and actuators. Three difference sol-gel routes will be studied, capable of depositing individual layers between 0.3-1 micron in thickness. Multiple depositions steps will be performed to achieve the required thickness. The effect of multilayering on film structure, and substrate and electrode interactions, will be studied using transmission electron microscopy and surface analysis techniques. The domain structure, and interface structure between individual layers, will be studied in detail. The electrical properties of the films will be investigated and related to film structure and process conditions, with the aim of refining fabrication methods in order to tailor properties to meet device specifications. Two of the sol-gel routes to be used have been devised and developed by one of the applicants: the so called diol route is uniquely capable of producing 1 micron single layer PZT and is attracting considerable interest in the US for microcapacitor and electromechanical applications, whilst the new triol route offers the possibility of crystallisation to ferroelectric PZT at temperatures <500 C making it potentially well suited to integration with semiconductor processing.
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Organisation Website: http://www.leeds.ac.uk