Details of Grant 

EPSRC Reference:	GR/M31026/01
Title:	OPTICAL TESTING OF INTEGRATED MICROELECTROMECHANICAL SYSTEMS (IMEMS) FOR PRODUCTION
Principal Investigator:	Harris, Dr AJ
Other Investigators:	Burdess, Professor J
Researcher Co-Investigators:
Project Partners:	BAE Systems Druck Ltd DSTL Air Systems Bedford
Department:	Electrical, Electronic & Computer Eng
Organisation:	Newcastle University
Scheme:	Standard Research (Pre-FEC)
Starts:	01 February 1999	Ends:	31 October 2002	Value (£):	261,610
EPSRC Research Topic Classifications:	Materials testing & eng.
EPSRC Industrial Sector Classifications:	Electronics No relevance to Underpinning Sectors
Related Grants:
Panel History:
Summary on Grant Application Form
The proposed programme will investigate the application of optical techniques to measure the mechanical properties of IMEMS and associated interfaces for the purpose of identifying mechanical faults resulting from the fabrication/assembly process. The optical techniques considered will include optical surface profiling and optical vibrometer measurements. The use of these measurement techniques to detect structural faults at the various stages of manufacture will be evaluated. For vibration measurements, methods of vibrating the system at the various stages of fabrication/assembly will be developed. The possibility of integrating both measurement techniques so that they can be applied simultaneously and at production line speeds will investigated.
Key Findings
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Potential use in non-academic contexts
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Further Information:
Organisation Website:	http://www.ncl.ac.uk