| EPSRC Reference: |
GR/L89914/01 |
| Title: |
THE DIAGNOSIS AND CONTROL OF MAGNETRON PLASMAS |
| Principal Investigator: |
Bradley, Professor JW |
| Other Investigators: |
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| Department: |
Physics |
| Organisation: |
UMIST |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
21 September 1998 |
Ends: |
20 December 2001 |
Value (£): |
146,668
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| No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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This proposal is concerned with the diagnosis and modelling of magnetron discharges and with the investigation of methods to modify and control magnetron plasma properties to fulfil technological goals. For instance, the ability to ionise the run magnetrons at very low pressures and high current densities for line-of sight deposition, the ability to ionise the sputtered atoms in the plasma for normal deposition at biased surfaces and the ability to understand and control the role of particular containments.In this programme, through the injection of electrons from both 'intrinsic' and 'external' sources, we will gain a better understanding of how the plasma properties (e.g. space potential, energy distribution functions) can be modified and how they are related to external parameters (e.g. the discharge pressure, cathode and magnetic field geometries). The effect of the changes on the structure and quality of thin films grown 'in-situ' will be assessed
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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