| EPSRC Reference: |
GR/L83240/01 |
| Title: |
THOMSON SCATTERING MEASUREMENTS IN LOW TEMPERATURE PLASMAS |
| Principal Investigator: |
Morrow, Dr T |
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| Department: |
Sch of Mathematics and Physics |
| Organisation: |
Queen's University of Belfast |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
25 May 1998 |
Ends: |
24 May 2000 |
Value (£): |
145,568
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Summary on Grant Application Form |
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Many of the rates for the processes which sustain plasmas and driven chemistry are very electron energy dependent. Therefore a knowledge of the detailed structure of the electron energy distribution function (eedf) in low temperature, technologically relevant plasmas is important. Until recently Langmuir probes is either difficult or impossible. For example in high density inductively coupled discharges, reactive etching and deposition applications.Here it is proposed to use Thomson scattering, the scattering of light by free electrons, to make non-intrusive and easily interpreted measurements of the eedfs in rf driven plasmas. Absolute calibration is possible by comparison with the intensity of Rayleigh scattering from gas atoms and spatio-temporal measurement s of the eedf are also possible. Initial measurements made in simple gases in the GEC (Gaseous Electronics Conference) rf reference reactor operating in inductive and capacitive mode. In the later stages measurements will be made in technologically relevant gases such as oxygen and chlorine.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.qub.ac.uk |