| EPSRC Reference: |
GR/L82380/01 |
| Title: |
TAILORING THE ENERGY DISTRIBUTIONS OF CHARGED PARTICLES IN LOW TEMPERATURE PLASMAS |
| Principal Investigator: |
Braithwaite, Professor NS |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Oxford Research Unit |
| Organisation: |
The Open University |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 January 1998 |
Ends: |
30 September 2001 |
Value (£): |
179,371
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| No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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Over the last two decades plasma technology has lead to major advances in materials processing, particularly in semiconductor device manufacture. Low pressure discharge plasmas are now used for a wide variety of materials processing from large area polymer treatments to micro-machining. Plasma processing exploits the physics and chemistry of the plasma-surface interactions and these are determined by fluxes of particles and energy across the electrostatic boundary layers (sheaths) which always arise at surfaces in low pressure plasmas. This proposal concerns the use of an electron beam to manipulate the density, energy and distribution of charged particles. Some of the work will be carried out in the UK Reference reactor, built in 1992 through a collaboration between the applicant and Prof. WG Graham at QUB. This is an international standard reactor for plasma processing where diagnostics, models and processes can be compared. The objectives of the proposed programme concern the tailoring of the electron and ion energy distributions in capacitively and inductively plasmas in the UK GEC Reference cell, and in other plasma systems, and the consequent enhancements to the control of etching and deposition processes.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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