| EPSRC Reference: |
GR/L81000/01 |
| Title: |
DEVELOPMENT OF TEST STRUCTURES FOR CHARACTERISING IC TECHNOLOGIES |
| Principal Investigator: |
Walton, Professor AJ |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Sch of Engineering |
| Organisation: |
University of Edinburgh |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 June 1998 |
Ends: |
28 February 2002 |
Value (£): |
395,355
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Summary on Grant Application Form |
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The aim of the proposed project is to make cost effective use of state-of-the-art resources to research and develop the design and measurement of new and improved test structures together with developing better parameter extraction techniques for devices. This will include continued work on structures designed to measure both feature dimensions and the misregistration between layers in order to meet precisions of better than 5nm. It is planned that the work on misregistration will also include the development of holographic and diffraction techniques. Microelectronic test structures will be developed to fully characterise both oxide and damascene metal CMP processes building upon previous structures developed at Edinburgh. In addition to this, work will also take place to further characterise Wafer Level Reliability (WLR) structures that are designed to produce rapid feedback on the reliability of semiconductor products. This approach is becoming more important as reliability levels approach 10 FITs. Techniques will also be developed to produce SPICE parameters that reflect the true varience observed in manufacture while at the same time attempting to minimise the number of measurements. TCAD and statistical software will be used as an integral part of the above activities.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ed.ac.uk |