| EPSRC Reference: |
GR/L28814/01 |
| Title: |
OPTIMISATION OF BULK MICROMACHINED ELECTROSTATIC ACTUATORS. |
| Principal Investigator: |
Syms, Professor R |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Electrical and Electronic Engineering |
| Organisation: |
Imperial College London |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 July 1997 |
Ends: |
31 July 2000 |
Value (£): |
124,339
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Instrumentation Eng. & Dev. |
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Summary on Grant Application Form |
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The aim of this project is to examine the performance and applications of bulk micromachined silicon electrostatic actuators using diode isolation. In particular, we wish to demonstrate that mechanical and electrical performance equal or superior to that of similar surface micromachined structures can be achieved. Then, taking advantage of the novel electrical configuration of the devices, we wish to demonstrate the following unique features: electrical tunability of the mechanical resonance, resonance matching in coupled resonator structures, and decoupling of drive and sense signals through frequency translation. We also wish to investigate generic aspects of mechanical design relevant to many similar actuator and sensor systems, namely the suppression of spurious two-dimensional modes of oscillation.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.imperial.ac.uk |